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1 |
High-resolution coherence scanning immersion interferometry for characterization of sub-micrometer surface structures
Enthalten in Technisches Messen Bd. 92, 2025, Nr. 5: 168-178. 11 S.
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2 |
State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications
Liu, Shujie. - Erlangen : Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU), 2024
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3 |
A novel approach to construct self-assembled 3D MEMS arrays
Akhundzada, Sapida. - Freiburg : Universität, 2023
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4 |
Investigation of measurement data of low-coherence interferometry at tilted surfaces in the 3D spatial frequency domain
Enthalten in Technisches Messen Bd. 89, 2022, Nr. 7-8: 515-524. 10 S.
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5 |
Tailoring Phospholes for Imprint of Fluorescent 3D Structures
Enthalten in European journal of inorganic chemistry Bd. 2019, 2019, Nr. 45: 4820-4825. 6 S.
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6 |
Soft UV nanoimprint lithography : concept, development, and fabrication of nanostructures with tunable feature sizes at constant pitch
Si, Shuhao. - Ilmenau : TU Ilmenau, 2018
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7 |
Fabrication and characterization of multi-stopband Fabry–Pérot filter array for nanospectrometers in the VIS range using SCIL nanoimprint technology
Enthalten in Applied nanoscience 29.5.2018: 1-11
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8 |
Multifunctional guest–host particles engineered by reversal nanoimprint lithography
Enthalten in Applied nanoscience 20.3.2018: 1-9
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9 |
3D nanoimprint for NIR Fabry-Pérot filter arrays: fabrication, characterization and comparison of different cavity designs
Enthalten in Applied nanoscience 24.2.2016: 1-9
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10 |
Nanotechnologie
Erlangen : Verl. für Wiss. und Leben Heidecker, 2004
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Administration
