Katalog der Deutschen Nationalbibliothek

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	51	Extendibility of the PECVD Porogen Approach for ULK Materials Enthalten in Materials Research Society: MRS online proceedings library Bd. 990, 30.12.2007, Nr. 1, date:12.2006: 1-6
	52	Dry Etch and Wet Clean Process Characterization of Ultra Low-k (ULK) Material Nanoglass®E Enthalten in Materials Research Society: MRS online proceedings library Bd. 812, 10.12.2020, Nr. 1, date:12.2003: F6.6.1-F6.6.6
	53	Coxsackievirus infection induces a non-canonical autophagy independent of the ULK and PI3K complexes Enthalten in Scientific reports Bd. 10, 4.11.2020, Nr. 1, date:12.2020: 1-14
	54	Charging and Aging Effects in Porous ULK Dielectrics Enthalten in Materials Research Society: MRS online proceedings library Bd. 990, 30.12.2007, Nr. 1, date:12.2006: 1-8