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	1	State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications Liu, Shujie. - Erlangen : Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU), 2024
	2	A novel approach to construct self-assembled 3D MEMS arrays Akhundzada, Sapida. - Freiburg : Universität, 2023
	3	Tailoring Phospholes for Imprint of Fluorescent 3D Structures Enthalten in European journal of inorganic chemistry Bd. 2019, 2019, Nr. 45: 4820-4825. 6 S.
	4	Soft UV nanoimprint lithography : concept, development, and fabrication of nanostructures with tunable feature sizes at constant pitch Si, Shuhao. - Ilmenau : TU Ilmenau, 2018
	5	3D nanoimprint for NIR Fabry-Pérot filter arrays: fabrication, characterization and comparison of different cavity designs Enthalten in Applied nanoscience 24.2.2016: 1-9
	6	A novel approach to construct self-assembled 3D MEMS arrays Enthalten in Microsystem technologies Bd. 28, 20.8.2022, Nr. 9, date:9.2022: 2139-2148
	7	Beiträge. High-resolution coherence scanning immersion interferometry for characterization of technical surface topographies Enthalten in Technisches Messen Bd. 91, 2024, Nr. s1: 84-89. 6 S.
	8	Development of optical MEMS-based micromirror arrays on flexible substrate for curvilinear surfaces Enthalten in Optical and quantum electronics Bd. 53, 18.4.2021, Nr. 5, date:5.2021: 1-10
	9	Highly uniform residual layers for arrays of 3D nanoimprinted cavities in Fabry–Pérot-filter-array-based nanospectrometers Enthalten in Applied nanoscience Bd. 6, 12.6.2015, Nr. 4, date:4.2016: 599-606
	10	Planar free-standing metal layer fabrication: implementing sub-structures in micromirror arrays for light steering applications Enthalten in Micro and Nano Systems Letters Bd. 8, 9.11.2020, Nr. 1, date:12.2020: 1-6

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