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1 |
State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications
Liu, Shujie. - Erlangen : Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU), 2024
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2 |
Tailoring Phospholes for Imprint of Fluorescent 3D Structures
Enthalten in European journal of inorganic chemistry Bd. 2019, 2019, Nr. 45: 4820-4825. 6 S.
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3 |
3D nanoimprint for NIR Fabry-Pérot filter arrays: fabrication, characterization and comparison of different cavity designs
Enthalten in Applied nanoscience 24.2.2016: 1-9
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4 |
A novel approach to construct self-assembled 3D MEMS arrays
Enthalten in Microsystem technologies Bd. 28, 20.8.2022, Nr. 9, date:9.2022: 2139-2148
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5 |
Beiträge. High-resolution coherence scanning immersion interferometry for characterization of technical surface topographies
Enthalten in Technisches Messen Bd. 91, 2024, Nr. s1: 84-89. 6 S.
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Development of optical MEMS-based micromirror arrays on flexible substrate for curvilinear surfaces
Enthalten in Optical and quantum electronics Bd. 53, 18.4.2021, Nr. 5, date:5.2021: 1-10
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Highly uniform residual layers for arrays of 3D nanoimprinted cavities in Fabry–Pérot-filter-array-based nanospectrometers
Enthalten in Applied nanoscience Bd. 6, 12.6.2015, Nr. 4, date:4.2016: 599-606
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Planar free-standing metal layer fabrication: implementing sub-structures in micromirror arrays for light steering applications
Enthalten in Micro and Nano Systems Letters Bd. 8, 9.11.2020, Nr. 1, date:12.2020: 1-6
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