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Ulk Enthalten in Pariser Tageszeitung Bd. 2, 19.04.1937, Nr. 312: 4
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Ulk Enthalten in Pariser Tageszeitung Bd. 1, 07.12.1936, Nr. 179: 4
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Supercritical Fluid Treatment to Improve Dielectric and Mechanical Properties of Porous ULK Thin Films Enthalten in Materials Research Society: MRS online proceedings library Bd. 914, 15.6.2006, Nr. 1, date:12.2005: 1-6
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PECVD Versus Spin-on to Perform Porous ULK for Advanced Interconnects: Chemical Composition, Porosity and Mechanical Behavior Enthalten in Materials Research Society: MRS online proceedings library Bd. 914, 14.6.2006, Nr. 1, date:12.2005: 1-6
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